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1

Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress

Brunner, Timothy A., Menon, Vinayan C., Wong, Cheuk Wun, Gluschenkov, Oleg, Belyansky, Michael P., Felix, Nelson M., Ausschnitt, Christopher P., Vukkadala, Pradeep, Veeraraghavan, Sathish, Sinha, Jayd

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2013

Langue:

english

Fichier:

PDF, 11.72 MB

english, 2013

2

Intrafield overlay correction for illumination-based distortion

Pike, Michael, Brunner, Timothy, Morgenfeld, Bradley, Jing, Nan, Wiltshire, Timothy

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2016

Langue:

english

Fichier:

PDF, 5.24 MB

english, 2016

3

High numerical aperture lithographic imagery at the Brewster angle

Brunner, Timothy A.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2002

Langue:

english

Fichier:

PDF, 584 KB

english, 2002

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Overlay characterization and matching of immersion photoclusters

Minghetti, Blandine, Dusa, Mircea V., Conley, Will, Brunner, Timothy, Robinson, Christopher, Ausschnitt, Christopher, Corliss, Dan, Felix, Nelson

Année:

2010

Langue:

english

Fichier:

PDF, 565 KB

english, 2010

5

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Total overlay analysis for designing future aligner

Magome, Nobutaka, Kawai, Hidemi, Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 463 KB

english, 1995

6

High-density automotive hydrogen storage with cryogenic capable pressure vessels

Salvador M. Aceves, Francisco Espinosa-Loza, Elias Ledesma-Orozco, Timothy O. Ross, Andrew H. Weisberg, Tobias C. Brunner, Oliver Kircher

Journal:

International Journal of Hydrogen Energy

Année:

2010

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2010

7

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Advances in Resist Technology and Processing XVIII - Optimum tone for various feature types: positive versus negative

Brunner, Timothy A., Fonseca, Carlos A., Houlihan, Francis M.

Année:

2001

Langue:

english

Fichier:

PDF, 119 KB

english, 2001

8

The determination of polymer additive effects in a spherilene process HDPE matrix upon water carry-over in water quenched, cast film extrusion

Cowell, Timothy J., Brunner, Clayton B.

Journal:

Journal of Vinyl and Additive Technology

Année:

1996

Langue:

english

Fichier:

PDF, 265 KB

english, 1996

9

SPIE Proceedings [SPIE Advances in Resist Technology and Processing VIII - San Jose, United States (Monday 4 March 1991)] Advances in Resist Technology and Processing VIII - Optimization of optical properties of resist processes

Brunner, Timothy A., Ito, Hiroshi

Année:

1991

Langue:

english

Fichier:

PDF, 883 KB

english, 1991

10

Laser bandwidth and other sources of focus blur in lithography

Brunner, Timothy

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2006

Langue:

english

Fichier:

PDF, 651 KB

english, 2006

11

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Hardmask technology for sub-100 nm lithographic imaging

Babich, Katherina, Mahorowala, Arpan P., Medeiros, David R., Pfeiffer, Dirk, Petrillo, Karen E., Angelopoulos, Marie, Grill, Alfred, Patel, Vishnubhai, Halle, Scott, Brunner, Timothy A., Conti, Richar

Année:

2003

Langue:

english

Fichier:

PDF, 1.24 MB

english, 2003

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Optical Microlithography XXIX - Patterned wafer geometry (PWG) metrology for improving process-induced overlay and focus problems

Erdmann, Andreas, Kye, Jongwook, Brunner, Timothy A., Zhou, Yue, Wong, Cheukwun, Morgenfeld, Bradley, Leino, Gerald, Mahajan, Sunit

Année:

2016

Langue:

english

Fichier:

PDF, 4.57 MB

english, 2016

13

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Scattered light in photolithographic lenses

Kirk, Joseph P., Brunner, Timothy A.

Année:

1994

Langue:

english

Fichier:

PDF, 291 KB

english, 1994

14

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Line-edge roughness (LER) performance targets for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Brunner, Timothy A., Chen, Xuemei, Gabor, Allen, Higgins, Craig, Sun, Lei, Mack, Chris A.

Année:

2017

Langue:

english

Fichier:

PDF, 679 KB

english, 2017

15

Pattern-dependent overlay error in optical step and repeat projection lithography

Timothy A. Brunner

Journal:

Microelectronic Engineering

Année:

1988

Langue:

english

Fichier:

PDF, 780 KB

english, 1988

16

Phosphate oxygen isotopes: Insights into sedimentary phosphorus cycling from the Benguela upwelling system

Tobias Goldhammer, Benjamin Brunner, Stefano M. Bernasconi, Timothy G. Ferdelman, Matthias Zabel

Journal:

Geochimica et Cosmochimica Acta

Année:

2011

Langue:

english

Fichier:

PDF, 895 KB

english, 2011

17

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Insertion strategy for EUV lithography

Wood, Obert, Arnold, John, Brunner, Timothy, Burkhardt, Martin, Chen, James H.-C., Civay, Deniz, Fan, Susan S.-C., Gallagher, Emily, Halle, Scott, He, Ming, Higgins, Craig, Kato, Hirokazu, Kye, Jongwo

Année:

2012

Langue:

english

Fichier:

PDF, 3.03 MB

english, 2012

18

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Optical Microlithography IX - Approximate models for resist processing effects

Brunner, Timothy A., Ferguson, Richard A., Fuller, Gene E.

Année:

1996

Langue:

english

Fichier:

PDF, 444 KB

english, 1996

19

[American Institute of Aeronautics and Astronautics Flight Simulation Technologies Conference - Hilton Head Island,SC,U.S.A. (24 August 1992 - 26 August 1992)] Flight Simulation Technologies Conference - Use of high-fidelity simulation in the development of an F/A-18 active ground collision avoidance system

FITZGERALD, TIMOTHY, BRUNNER, MICHAEL

Année:

1992

Langue:

english

Fichier:

PDF, 712 KB

english, 1992

20

Dose-focus monitor technique using a critical-dimension scanning electron microscope and its application to local variation analysis

Hotta, Shoji, Brunner, Timothy, Halle, Scott, Hitomi, Keiichiro, Kato, Takeshi, Yamaguchi, Atsuko

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2012

Langue:

english

Fichier:

PDF, 4.52 MB

english, 2012

21

Rim phase-shift mask combined with off-axis illumination: a path to 0.5(lambda)/numerical aperture geometries

Brunner, Timothy A.

Journal:

Optical Engineering

Année:

1993

Langue:

english

Fichier:

PDF, 350 KB

english, 1993

22

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - KrF excimer laser with repetition rates of 1 kHz for DUV lithography

Paetzel, Rainer, Kleinschmidt, Juergen, Rebhan, Ulrich, Franklin, Jim, Endert, Heinrich, Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 381 KB

english, 1995

23

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Optical Microlithography XXVIII - Intra-field overlay correction for illumination based distortion

Lai, Kafai, Erdmann, Andreas, Pike, Michael, Brunner, Timothy, Morgenfeld, Bradley, Jing, Nan, Wiltshire, Timothy

Année:

2015

Langue:

english

Fichier:

PDF, 1.18 MB

english, 2015

24

[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Monitoring process-induced focus errors using high-resolution flatness metrology

Morgenfeld, Bradley J., Brunner, Timothy A., Nummy, Karen, Stoll, Derek, Jing, Nan, Lin, Hong, Vukkadala, Pradeep, Herrera, Pedro, Ramkhalawon, Roshita, Sinha, Jaydeep

Année:

2015

Langue:

english

Fichier:

PDF, 1.34 MB

english, 2015

25

A paleoenvironmental study of early to middle Pleistocene foraminifera of the Santa Barbara Formation at Santa Barbara, California

Patterson, R. Timothy, Brunner, Charlotte A., Capo, Rosemary, Dahl, Jeremy

Journal:

Journal of Paleontology

Année:

1990

Langue:

english

Fichier:

PDF, 14.43 MB

english, 1990

26

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - Determining DOF requirements needed to meet technology process assumptions

Gabor, Allen, Brendler, Andrew, Liegl, Bernhard, Brodsky, Colin, Lembach, Gerhard, Mansfield, Scott, Mishra, Shailendra, Brunner, Timothy, Wiltshire, Timothy, Menon, Vinayan, Li, Wai-kin

Année:

2008

Langue:

english

Fichier:

PDF, 984 KB

english, 2008

27

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Multiple-exposure interferometric lithography

Zaidi, Saleem H., Brueck, Steven R. J., Brunner, Timothy A.

Année:

1994

Langue:

english

Fichier:

PDF, 377 KB

english, 1994

28

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Yield modeling and enhancement for optical lithography

Charrier, Edward W., Mack, Chris A., Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 402 KB

english, 1995

29

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Detailed study of a phase-shift focus monitor

Pugh, Graham M., DeWitt, Brian R., Sager, Craig B., Reynolds, Patrick, Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 520 KB

english, 1995

30

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - 193-nm full-field step-and-scan prototype at MIT Lincoln Laboratory

Hibbs, Michael S., Kunz, Roderick R., Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 418 KB

english, 1995

31

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Phase-shifter edge effects on attenuated phase-shifting mask image quality

Wong, Alfred K. K., Ferguson, Richard A., Neureuther, Andrew R., Brunner, Timothy A.

Année:

1994

Langue:

english

Fichier:

PDF, 519 KB

english, 1994

32

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Antireflection coating process characterization and improvement for DUV lithography at 0.25 um: ground rules

Sturtevant, John L., Chaara, M., Elliot, R., Hollifield, Jr., Larry D., Soper, Robert A., Stark, David R., Thane, Nathan S., Petersen, John S., Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 523 KB

english, 1995

33

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Using the focus monitor test mask to characterize lithographic performance

Mih, Rebecca D., Martin, Alexander L., Brunner, Timothy A., Long, David T., Brown, Diane L., Brunner, Timothy A.

Année:

1995

Langue:

english

Fichier:

PDF, 324 KB

english, 1995

34

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Optimized registration model for 2:1 stepper field matching

Flack, Warren W., Flores, Gary E., Pellegrini, Joseph C., Merrill, Mark A., Brunner, Timothy A.

Année:

1994

Langue:

english

Fichier:

PDF, 537 KB

english, 1994

35

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Micrascan II overlay error analysis

Cronin, David J., Gallatin, Gregg M., Brunner, Timothy A.

Année:

1994

Langue:

english

Fichier:

PDF, 751 KB

english, 1994

36

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Vote-taking for EUV lithography: a radical approach to mitigate mask defects

Panning, Eric M., Goldberg, Kenneth A., Brunner, Timothy A., Ozlem, Melih, Han, Geng, Rankin, Jed, Wood, Obert, Verduijn, Erik

Année:

2017

Langue:

english

Fichier:

PDF, 818 KB

english, 2017

37

Genomics in childhood acute myeloid leukemia comes of age

Brunner, Andrew M, Graubert, Timothy A

Journal:

Nature Medicine

Année:

2018

Langue:

english

Fichier:

PDF, 1.74 MB

english, 2018

38

Induction of Noninflammatory Pain in an Experimental Foot Lameness Model in Horses

Brunner, Timothy J., Lescun, Timothy B., Moore, George E., Grady, Shannon E., Davern, Alec J., Taylor, Sandra D.

Journal:

Journal of Equine Veterinary Science

Année:

2020

Fichier:

PDF, 708 KB

2020

39

Hostility, dieting, and nutrition attitudes in overweight and weight-cycling men and women

Timothy P. Carmody, Robert L. Brunner, Sachiko T. St. Jeor

Journal:

Journal of Eating Disorders

Année:

1999

Langue:

english

Fichier:

PDF, 113 KB

english, 1999

40

Dietary helplessness and disinhibition in weight cyclers and maintainers

Dr. Timothy P. Carmody, Robert L. Brunner, Sachiko T. St. Jeor

Journal:

Journal of Eating Disorders

Année:

1995

Langue:

english

Fichier:

PDF, 661 KB

english, 1995

41

Prolonged expression of CD154 on CD4 T cells from pediatric lupus patients correlates with increased CD154 transcription, increased nuclear factor of activated T cell activity, and glomerulonephritis

Jay Mehta, Anna Genin, Michael Brunner, Lisabeth V. Scalzi, Nilamadhab Mishra, Timothy Beukelman, Randy Q. Cron

Journal:

Arthritis & Rheumatism

Année:

2010

Langue:

english

Fichier:

PDF, 301 KB

english, 2010

42

The imprint of methane seepage on the geochemical record and early diagenetic processes in cold-water coral mounds on Pen Duick Escarpment, Gulf of Cadiz

Laura M. Wehrmann, Stefanie P. Templer, Benjamin Brunner, Stefano M. Bernasconi, Lois Maignien, Timothy G. Ferdelman

Journal:

Année:

2011

Langue:

english

Fichier:

PDF, 2.15 MB

english, 2011

43

Meat, poultry and fish and risk of colorectal cancer: pooled analysis of data from the UK dietary cohort consortium

Elizabeth A. Spencer, Timothy J. Key, Paul N. Appleby, Christina C. Dahm, Ruth H. Keogh, Ian S. Fentiman, Tasnime Akbaraly, Eric J. Brunner, Victoria Burley, Janet E. Cade, Darren C. Greenwood, Alison

Journal:

Cancer Causes & Control

Année:

2010

Langue:

english

Fichier:

PDF, 311 KB

english, 2010

44

Erratum to: Meat, poultry and fish and risk of colorectal cancer: pooled analysis of data from the UK dietary cohort consortium

Elizabeth A. Spencer, Timothy J. Key, Paul N. Appleby, Christina C. Dahm, Ruth H. Keogh, Ian S. Fentiman, Tasnime Akbaraly, Eric J. Brunner, Victoria Burley, Janet E. Cade, Darren C. Greenwood, Alison

Journal:

Cancer Causes & Control

Année:

2011

Langue:

english

Fichier:

PDF, 90 KB

english, 2011

45

New experimental evidence for the energy corrected sudden scaling law

Timothy A. Brunner, Neil Smith, David E. Pritchard

Journal:

Chemical Physics Letters

Année:

1980

Langue:

english

Fichier:

PDF, 420 KB

english, 1980

46

Low cathepsin D and low plasminogen activator type 1 inhibitor in tumor cytosols defines a group of node negative breast cancer patients with low risk of recurrence

Timothy Edward Kute, Jan Grøndahl-Hansen, Si-Ming Shao, Rena Long, Greg Russell, Nils Brünner

Journal:

Breast Cancer Research and Treatment

Année:

1998

Langue:

english

Fichier:

PDF, 90 KB

english, 1998

47

Vitamins, minerals, essential fatty acids and colorectal cancer risk in the United Kingdom Dietary Cohort Consortium

Timothy J. Key, Paul N. Appleby, Gabriel Masset, Eric J. Brunner, Janet E. Cade, Darren C. Greenwood, Alison M. Stephen, Diana Kuh, Amit Bhaniani, Natasha Powell, Kay-Tee Khaw

Journal:

International Journal of Cancer

Année:

2012

Langue:

english

Fichier:

PDF, 776 KB

english, 2012

48

Comparative Intravenous Toxicity of Cisplatin Solution and Cisplatin Encapsulated in Long-Circulating, Pegylated Liposomes in Cynomolgus Monkeys

Peter K. Working, Mary S. Newman, Timothy Sullivan, Michael Brunner, Michael Podell, Zarife Sahenk, Nancy Turner

Journal:

Toxicological Sciences

Année:

1998

Langue:

english

Fichier:

PDF, 1.04 MB

english, 1998

49

Besifloxacin ophthalmic suspension 0.6% in patients with bacterial conjunctivitis: A multicenter, prospective, randomized, double-masked, vehicle-controlled, 5-day efficacy and safety study

Paul Karpecki, Michael DePaolis, Judy A. Hunter, Eric M. White, Lee Rigel, Lynne S. Brunner, Dale W. Usner, Michael R. Paterno, Timothy L. Comstock

Journal:

Clinical Therapeutics

Année:

2009

Langue:

english

Fichier:

PDF, 1.79 MB

english, 2009

50

Phase III efficacy and safety study of besifloxacin ophthalmic suspension 0.6% in the treatment of bacterial conjunctivitis

Tepedino, Michael E., Heller, Warren H., Usner, Dale W., Brunner, Lynne S., Morris, Timothy W., Haas, Wolfgang, Paterno, Michael R., Comstock, Timothy L.

Journal:

Current Medical Research and Opinion

Année:

2009

Langue:

english

Fichier:

PDF, 304 KB

english, 2009